Invention Grant
- Patent Title: Composition for etching treatment of resin material
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Application No.: US14655555Application Date: 2014-10-16
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Publication No.: US09657226B2Publication Date: 2017-05-23
- Inventor: Shingo Nagamine , Koji Kita , Kuniaki Otsuka
- Applicant: OKUNO CHEMICAL INDUSTRIES CO., LTD.
- Applicant Address: JP Osaka-shi
- Assignee: OKUNO CHEMICAL INDUSTRIES CO., LTD.
- Current Assignee: OKUNO CHEMICAL INDUSTRIES CO., LTD.
- Current Assignee Address: JP Osaka-shi
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Priority: JP2013-219456 20131022; JP2013-255121 20131210; JP2014-038620 20140228
- International Application: PCT/JP2014/077580 WO 20141016
- International Announcement: WO2015/060196 WO 20150430
- Main IPC: C09K13/00
- IPC: C09K13/00 ; C09K13/04 ; C03C15/00 ; C03C25/68 ; C23C18/16 ; C23F3/02 ; C23F1/14 ; C23C18/24 ; C25B1/28 ; C08J7/14 ; C23C18/20 ; H01L21/306 ; H01L21/02 ; C23C18/30 ; C25D5/14 ; C23C18/28 ; C23C18/32 ; C23C18/38

Abstract:
The present invention provides a composition for etching treatment of a resin material, the composition comprising an aqueous solution having a permanganate ion concentration of 0.2 mmol/L or more and a total acid concentration of 10 mol/L or more, and the aqueous solution satisfying at least one of the following conditions (1) to (3): (1) containing an organic sulfonic acid in an amount of 1.5 mol/L or more, (2) setting the divalent manganese ion molar concentration to 15 or more times higher than the permanganate ion molar concentration, and (3) setting the addition amount of an anhydrous magnesium salt to 0.1 to 1 mol/L. The composition for etching treatment of the present invention is a composition containing no hexavalent chromium and having excellent etching performance and good bath stability.
Public/Granted literature
- US20150344777A1 COMPOSITION FOR ETCHING TREATMENT OF RESIN MATERIAL Public/Granted day:2015-12-03
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