Part of an atmosphere gas in a heating zone and/or a soaking zone is sucked out and is cooled through a high-temperature gas passage of a heat exchanger by heat exchange with a gas in a low-temperature gas passage, then cooled through a gas cooler, then dehumidified to a dew point of −45° C. or less in a dryer, then heated through the low-temperature gas passage of the heat exchanger by heat exchange with a gas in the high-temperature gas passage, and returned to the heating zone and/or the soaking zone. Part of gas flowing from the dryer toward the low-temperature gas passage of the heat exchanger is returned to a cooling zone. These can achieve a low dew point of −45° C. or less with high energy efficiency.