Invention Grant
- Patent Title: DLC film coating and coated valve lifter
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Application No.: US14772030Application Date: 2013-03-22
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Publication No.: US09657384B2Publication Date: 2017-05-23
- Inventor: Yukio Kubota , Shinichi Ishii
- Applicant: Nittan Valve Co., Ltd.
- Applicant Address: JP Kanagawa
- Assignee: NITTAN VALVE CO., LTD.
- Current Assignee: NITTAN VALVE CO., LTD.
- Current Assignee Address: JP Kanagawa
- Agency: Fulwider Patton LLP
- International Application: PCT/JP2013/058244 WO 20130322
- International Announcement: WO2014/147805 WO 20140925
- Main IPC: C23C16/26
- IPC: C23C16/26 ; C23C14/06 ; C23C16/02 ; C23C14/02 ; F01L3/04

Abstract:
The present invention provides a DLC (diamond like carbon) film coating and a coated valve lifter, wherein the DLC film coating can be formed at a film forming rate comparable with that achieved in the case of forming the DLC coating film by the CVD (chemical vapor deposition) method and has good durability comparable with that obtained in the case of forming the DLC film coating by the sputtering film forming method.The DLC film coating includes an intermediate layer 3 deposited on the surface of a base substrate and a DLC layer 4 deposited on the intermediate layer 3. The intermediate layer 3 is formed of metal carbide or metal capable of forming a hard surface and the DLC layer 4 is formed by adding a common metal element to that contained in the intermediate layer 3 thereto while inert gas containing hydrocarbon gas is being introduced. As a result, the intermediate layer 3 and the DLC layer 4 can be formed by sequential sputtering processing and in addition, an H (hydrogen) content contained in the DLC layer 4 can be adjusted by forming a Me-DLC (metal addition DLC) layer as a DLC layer 4.
Public/Granted literature
- US20160017477A1 DLC FILM COATING AND COATED VALVE LIFTER Public/Granted day:2016-01-21
Information query
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