Invention Grant
- Patent Title: Method and system for determining information about a transparent optical element comprising a lens portion and a plane parallel portion
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Application No.: US14825355Application Date: 2015-08-13
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Publication No.: US09658129B2Publication Date: 2017-05-23
- Inventor: Xavier Colonna de Lega , Martin F. Fay , Peter J. de Groot
- Applicant: Zygo Corporation
- Applicant Address: US CT Middlefield
- Assignee: Zygo Corporation
- Current Assignee: Zygo Corporation
- Current Assignee Address: US CT Middlefield
- Agency: Fish & Richardson P.C.
- Main IPC: G01M11/02
- IPC: G01M11/02 ; G01B11/24

Abstract:
A method for determining information about a transparent optical element including a lens portion and a plane parallel portion, the lens portion having at least one curved surface and the plane parallel portion having opposing first and second surfaces, includes: directing measurement light to the transparent optical element; detecting measurement light reflected from at least one location on the first surface of the plane parallel portion; detecting measurement light reflected from the second surface of the plane parallel portion at a location corresponding to the at least one location on the first surface; determining, based on the detected light, information about the plane parallel portion; and evaluating the transparent optical element based on the information about the plane parallel portion.
Public/Granted literature
- US20160047712A1 OPTICAL EVALUATION OF LENSES AND LENS MOLDS Public/Granted day:2016-02-18
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