Invention Grant
- Patent Title: System for viewing samples that are undergoing ellipsometric investigation in real time
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Application No.: US14544706Application Date: 2015-02-06
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Publication No.: US09658151B2Publication Date: 2017-05-23
- Inventor: Martin M. Liphardt , Galen L. Pfeiffer
- Applicant: Martin M. Liphardt , Galen L. Pfeiffer
- Applicant Address: US NE Lincoln
- Assignee: J.A. WOOLLAM CO., INC.
- Current Assignee: J.A. WOOLLAM CO., INC.
- Current Assignee Address: US NE Lincoln
- Agent James D. Welch
- Main IPC: G01N21/21
- IPC: G01N21/21 ; H04N5/232 ; G01N21/55

Abstract:
In the context of an ellipsometer or the like, positioning a camera other than directly above a sample being investigated by an electromagnetic beam, while said camera provides an optical view of a surface of said sample which is in focus over the entire viewed extent of the sample, and wherein a contrast improving system involving two beams provided by a beam splitting system is utilized.
Public/Granted literature
- US20150185136A1 System for viewing samples that are undergoing ellipsometric investigation in real time Public/Granted day:2015-07-02
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