Invention Grant
- Patent Title: X-ray topography apparatus
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Application No.: US14538837Application Date: 2014-11-12
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Publication No.: US09658174B2Publication Date: 2017-05-23
- Inventor: Kazuhiko Omote , Keiichi Morikawa , Yoshinori Ueji , Masahiro Tsuchiya , Takeshi Fujimura , Atsunori Kiku
- Applicant: Rigaku Corporation
- Applicant Address: JP Akishima-Shi, Tokyo
- Assignee: RIGAKU CORPORATION
- Current Assignee: RIGAKU CORPORATION
- Current Assignee Address: JP Akishima-Shi, Tokyo
- Agency: Buchanan Ingersoll & Rooney PC
- Priority: JP2013-246533 20131128
- Main IPC: G01N23/20
- IPC: G01N23/20 ; G01N23/207 ; G21K1/06

Abstract:
Disclosed is an X-ray topography apparatus including an X-ray source, a multilayer film mirror, a slit, a two-dimensional X-ray detector, and a sample moving device that sequentially moves the sample to a plurality of step positions. The X-ray source is a minute focal spot. The multilayer film mirror forms monochromatic, collimated, high-intensity X-rays. The direction in which the multilayer film mirror collimates the X-rays coincides with the width direction of the slit. The step size by which the sample is moved is smaller than the width of the slit. The combination of the size of the minute focal spot, the width of the slit, and the intensity of the X-rays that exit out of the multilayer film mirror allows the contrast of an X-ray image produced when the detector receives X-rays for a predetermined period of 1 minute or shorter to be high enough for observation of the X-ray image.
Public/Granted literature
- US20150146858A1 X-RAY TOPOGRAPHY APPARATUS Public/Granted day:2015-05-28
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