Invention Grant
- Patent Title: Method of studying a sample in an ETEM
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Application No.: US13566834Application Date: 2012-08-03
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Publication No.: US09658246B2Publication Date: 2017-05-23
- Inventor: Stan Johan Pieter Konings , Stephan Kujawa , Petrus Hubertus Franciscus Trompenaars
- Applicant: Stan Johan Pieter Konings , Stephan Kujawa , Petrus Hubertus Franciscus Trompenaars
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Agency: Scheinberg & Associates, P.C.
- Agent Michael O. Scheinberg; John E. Hillert
- Priority: EP11176445 20110803
- Main IPC: G01N23/04
- IPC: G01N23/04 ; G01Q30/12 ; H01J37/20 ; H01J37/26 ; B82Y35/00

Abstract:
A method and apparatus is provided for studying the reaction (chemical or physical) of a sample with a gas in the active atmosphere of an instrument such as an Environmental Transmission Electron Microscope (ETEM), optical microscope, X-ray microscope or scanning probe microscope. The sample is exposed to inert gas at a desired temperature before exchanging the inert gas to the active gas to reduce to avoid, or at least minimize, sample drift during image acquisition.
Public/Granted literature
- US20130040400A1 METHOD OF STUDYING A SAMPLE IN AN ETEM Public/Granted day:2013-02-14
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