Invention Grant
- Patent Title: Method for fabricating a device for propagating light
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Application No.: US14831383Application Date: 2015-08-20
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Publication No.: US09658400B2Publication Date: 2017-05-23
- Inventor: Jens Hofrichter , Daniel S. Jubin , Edward W. Kiewra , Antonio La Porta
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent Daniel P. Morris
- Main IPC: H01L21/00
- IPC: H01L21/00 ; G02B6/132 ; G02B6/136 ; G02B6/122
Abstract:
A method of forming a device for propagating light includes providing a substrate having a semiconductor material; placing an insulating layer on the substrate; providing a recess reaching through the insulating layer and into the substrate; filling the recess at least partially with a filler material; and arranging a waveguide in or on the filler material.
Public/Granted literature
- US20170052318A1 DEVICE FOR PROPAGATING LIGHT AND METHOD FOR FABRICATING A DEVICE Public/Granted day:2017-02-23
Information query
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