Invention Grant
- Patent Title: Alignment of single-mode polymer waveguide (PWG) array and silicon waveguide (SiWG) array of providing adiabatic coupling
-
Application No.: US15152853Application Date: 2016-05-12
-
Publication No.: US09658411B2Publication Date: 2017-05-23
- Inventor: Hidetoshi Numata , Yoichi Taira , Masao Tokunari
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent David M. Quinn, Esq.
- Priority: JP2012-231097 20121018
- Main IPC: G02B6/00
- IPC: G02B6/00 ; G02B6/34 ; G02B6/42 ; G02B6/10 ; G02B6/122 ; B29C33/38 ; B29D11/00 ; G02B6/38 ; G02B6/12 ; G02B6/28

Abstract:
A structure includes a combination of a stub fabricated on a polymer and a groove fabricated on a silicon (Si) chip, with which an adiabatic coupling can be realized by aligning a (single-mode) polymer waveguide (PWG) array fabricated on the polymer with a silicon waveguide (SiWG) array fabricated on the silicon chip. The stub fabricated on the polymer is patterned according to a nano-imprint process along with the PWG array in a direction in which the PWG array is fabricated. The groove fabricated on the silicon chip is fabricated along a direction in which the SiWG array is fabricated.
Public/Granted literature
Information query