Invention Grant
- Patent Title: Sealing structure, interference filter, optical module, and electronic apparatus
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Application No.: US14215573Application Date: 2014-03-17
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Publication No.: US09658446B2Publication Date: 2017-05-23
- Inventor: Nozomu Hirokubo
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2013-054682 20130318
- Main IPC: H01J40/14
- IPC: H01J40/14 ; H01J5/02 ; G02B26/00 ; G01J3/26

Abstract:
An interference filter includes a first substrate on which a fixed reflection film is provided, a second substrate which faces the first substrate and on which a movable reflection film is provided, a first bonding film that bonds the first substrate and the second substrate to each other, and a sealer that is disposed between the first substrate and the second substrate in a first interspace that allows a first internal space sandwiched between the first substrate and the second substrate to communicate with a space outside the interference filter, the sealer sealing the first internal space, and an inter-substrate distance between the first substrate and the second substrate in the first interspace decreases in a direction from outer circumferential edges of the substrates toward an inner portion of the first interspace in a plan view viewed in a substrate thickness direction.
Public/Granted literature
- US20140263983A1 SEALING STRUCTURE, INTERFERENCE FILTER, OPTICAL MODULE, AND ELECTRONIC APPARATUS Public/Granted day:2014-09-18
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