Invention Grant
- Patent Title: Arrangement of a mirror
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Application No.: US14269276Application Date: 2014-05-05
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Publication No.: US09658533B2Publication Date: 2017-05-23
- Inventor: Johannes Ruoff , Heiko Feldmann , Michael Layh
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102011086345 20111115
- Main IPC: G03B27/54
- IPC: G03B27/54 ; G03F7/20 ; G02B5/09 ; G21K1/06 ; G02B5/08 ; B82Y10/00

Abstract:
A mirror for EUV radiation comprises a total reflection surface, which has a first EUV-radiation-reflecting region and at least one second EUV-radiation-reflecting region, wherein the EUV-radiation-reflecting regions are structurally delimited from one another, wherein the first region comprises at least one first partial reflection surface which is surrounded along a circumference in each case by the at least one second region, and wherein the at least one second EUV-radiation-reflecting region comprises at least one second partial reflection surface which is embodied in a path-connected fashion and which is embodied in a continuous fashion.
Public/Granted literature
- US20140240686A1 ARRANGEMENT OF A MIRROR Public/Granted day:2014-08-28
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