Invention Grant
- Patent Title: Methods and systems for printing periodic patterns
-
Application No.: US14778324Application Date: 2014-03-18
-
Publication No.: US09658535B2Publication Date: 2017-05-23
- Inventor: Francis Clube , Harun Solak , Christian Dais
- Applicant: EULITHA A.G.
- Applicant Address: CH Wurenlingen
- Assignee: Eulitha A.G.
- Current Assignee: Eulitha A.G.
- Current Assignee Address: CH Wurenlingen
- Agent Laurence A. Greenberg; Werner H. Stemer; Ralph E. Locher
- International Application: PCT/IB2014/059949 WO 20140318
- International Announcement: WO2014/147562 WO 20140925
- Main IPC: G03B27/54
- IPC: G03B27/54 ; G03F7/20

Abstract:
A method for printing a periodic pattern of features into a photosensitive layer includes providing a mask bearing a periodic pattern, providing a substrate bearing the photosensitive layer, and arranging the substrate substantially parallel to the mask. A beam of collimated monochromatic light is formed for illuminating the mask pattern so that the light-field transmitted by the mask forms Talbot image planes separated by a Talbot distance. N sub-exposures of the mask with the beam are performed and the separation between sub-exposures are changed so that the relative separation during the ith sub-exposure with respect to that during the first sub-exposure is given by (mi+ni/N) times the Talbot distance. The mask pattern is exposed to the same energy density of illumination for each sub-exposure, wherein the period is selected in relation to the wavelength so that only the zeroth and first diffraction orders are transmitted by the mask.
Public/Granted literature
- US20160062246A1 METHODS AND SYSTEMS FOR PRINTING PERIODIC PATTERNS Public/Granted day:2016-03-03
Information query