Invention Grant
- Patent Title: Semiconductor overlay production system and method
-
Application No.: US14753893Application Date: 2015-06-29
-
Publication No.: US09659128B2Publication Date: 2017-05-23
- Inventor: Po-Chang Huang , Ying Ying Wang , Shellin Liu , Kuan-Chi Chen
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Slater Matsil, LLP
- Main IPC: G06F17/50
- IPC: G06F17/50 ; G03F7/20

Abstract:
Disclosed herein is a system and method for producing semiconductor devices using overlays, the method comprising associating one or more patterned overlays with respective ones of reserved regions in a layer template, receiving a layer design based on the layer template, identifying the reserved regions in the layer design, generating a production layer design based on the layer design, the production layer design describing at least one production overlay in one of the reserved regions, and fabricating one or more devices based on the production layer design.
Public/Granted literature
- US20150302127A1 Semiconductor Overlay Production System and Method Public/Granted day:2015-10-22
Information query