Invention Grant
- Patent Title: Method for presetting tuner of plasma processing apparatus and plasma processing apparatus
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Application No.: US15000228Application Date: 2016-01-19
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Publication No.: US09659752B2Publication Date: 2017-05-23
- Inventor: Ryo Miyama
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Rothwell, Figg, Ernst & Manbeck, P.C.
- Priority: JP2015-008937 20150120
- Main IPC: H01J37/32
- IPC: H01J37/32

Abstract:
Disclosed is a method for presetting a tuner that matches a power required for plasma emission in a plasma processing apparatus. The method includes: obtaining a relationship of a time lapse from power supply, an emission intensity of plasma, and a setting position of the tuner by emitting plasma; differentiating the emission intensity by time to calculate a time when an increase rate of the emission intensity becomes maximum; and setting the setting position of the tuner at a time, which is obtained by subtracting a time required from the setting of the tuner until the setting is reflected on the emission intensity from the time when the increase rate of the emission intensity becomes maximum, as a preset position.
Public/Granted literature
- US20160211120A1 METHOD FOR PRESETTING TUNER OF PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING APPARATUS Public/Granted day:2016-07-21
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