Invention Grant
- Patent Title: Semiconductor device having a plurality of fins and method for fabricating the same
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Application No.: US15197243Application Date: 2016-06-29
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Publication No.: US09659932B2Publication Date: 2017-05-23
- Inventor: Yu-Lien Huang
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: McDermott Will & Emery LLP
- Main IPC: H01L21/336
- IPC: H01L21/336 ; H01L27/088 ; H01L21/8234 ; H01L29/06 ; H01L29/78 ; H01L29/66 ; H01L21/306 ; H01L21/308 ; H01L21/3105

Abstract:
A semiconductor device having a plurality of fins including at least one first fin and at least one second fin formed on a semiconductor substrate is provided. Each of the first fin and second fin has a first portion and a second portion. A gate electrode structure overlies the first portion of the plurality of fins. The gate electrode structure includes a gate electrode, and a gate dielectric layer between the gate electrode and the plurality of fins, A first electrode overlies the second portion of the plurality of fins and the first electrode is in electrical contact with the second portion of the plurality of fins. The gate electrode structure is in direct physical contact with the first portion of the first fin and the gate electrode structure is spaced apart from the first portion of the second fin.
Public/Granted literature
- US20160315082A1 SEMICONDUCTOR DEVICE HAVING A PLURALITY OF FINS AND METHOD FOR FABRICATING THE SAME Public/Granted day:2016-10-27
Information query
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