Invention Grant
- Patent Title: Method for producing semiconductor device
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Application No.: US15402361Application Date: 2017-01-10
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Publication No.: US09660051B1Publication Date: 2017-05-23
- Inventor: Fujio Masuoka , Hiroki Nakamura
- Applicant: Unisantis Electronics Singapore Pte. Ltd.
- Applicant Address: SG Singapore
- Assignee: Unisantis Electronics Singapore Pte. Ltd.
- Current Assignee: Unisantis Electronics Singapore Pte. Ltd.
- Current Assignee Address: SG Singapore
- Agency: Brinks Gilson & Lione
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/78 ; H01L29/423 ; H01L29/06

Abstract:
A method for producing a semiconductor device includes forming a first insulating film around a fin-shaped semiconductor layer and forming a pillar-shaped semiconductor layer and forming a second diffusion layer in an upper portion of the fin-shaped semiconductor layer and a lower portion of the pillar-shaped semiconductor layer. A metal-semiconductor compound is formed on the second diffusion layer. A first metal is deposited to form a gate electrode and a gate line. Second and third metal films are deposited to form a first contact in which the second metal film surrounds a sidewall of an upper portion of the pillar-shaped semiconductor layer, and a second contact connects an upper portion of the first contact and an upper portion of the pillar-shaped semiconductor layer. A third contact is formed on the gate line.
Public/Granted literature
- US20170148898A1 METHOD FOR PRODUCING SEMICONDUCTOR DEVICE Public/Granted day:2017-05-25
Information query
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