Invention Grant
- Patent Title: Thin film transistor and method for manufacturing same
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Application No.: US14888213Application Date: 2014-06-24
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Publication No.: US09660103B2Publication Date: 2017-05-23
- Inventor: Mototaka Ochi , Shinya Morita , Yasuyuki Takanashi , Hiroshi Goto , Toshihiro Kugimiya
- Applicant: KABUSHIKI KAISHA KOBE SEIKO SHO (KOBE STEEL, LTD.)
- Applicant Address: JP Kobe-shi
- Assignee: Kobe Steel, Ltd.
- Current Assignee: Kobe Steel, Ltd.
- Current Assignee Address: JP Kobe-shi
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2013-137294 20130628; JP2014-082143 20140411
- International Application: PCT/JP2014/066620 WO 20140624
- International Announcement: WO2014/208520 WO 20141231
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L27/12 ; H01L21/477 ; H01L29/24 ; H01L29/66

Abstract:
This thin film transistor comprises, on a substrate, at least a gate electrode, a gate insulating film, an oxide semiconductor layer, a source-drain electrode, and two or more protective films. The oxide semiconductor layer comprises Sn, O and one or more elements selected from the group consisting of In, Ga and Zn. In addition, the two or more protective films are composed of at least a first protective film that is in contact with the oxide semiconductor film, and one or more second protective films other than the first protective film. The first protective film is a SiOx film having a hydrogen concentration of 3.5 atomic % or lower.
Public/Granted literature
- US20160079437A1 THIN FILM TRANSISTOR AND METHOD FOR MANUFACTURING SAME Public/Granted day:2016-03-17
Information query
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