Invention Grant
- Patent Title: Sputtering target and method for producing same
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Application No.: US14111520Application Date: 2012-04-24
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Publication No.: US09660127B2Publication Date: 2017-05-23
- Inventor: Shoubin Zhang , Masahiro Shoji
- Applicant: Shoubin Zhang , Masahiro Shoji
- Applicant Address: JP Tokyo JP Tokyo
- Assignee: MITSUBISHI MATERIALS CORPORATION,SOLAR FRONTIER K.K.
- Current Assignee: MITSUBISHI MATERIALS CORPORATION,SOLAR FRONTIER K.K.
- Current Assignee Address: JP Tokyo JP Tokyo
- Agency: Leason Ellis LLP
- Priority: JP2011-102587 20110429
- International Application: PCT/JP2012/061516 WO 20120424
- International Announcement: WO2012/147985 WO 20121101
- Main IPC: C22C9/00
- IPC: C22C9/00 ; C22F1/08 ; H01L31/18 ; H01L31/032 ; C23C14/34 ; C22C1/04 ; B22F3/15

Abstract:
Provided are a sputtering target that is capable of forming a Cu—Ga film, which has an added Ga concentration of 1 to 40 at % and into which Na is well added, by a sputtering method and a method for producing the sputtering target. The sputtering target has a component composition that contains 1 to 40 at % of Ga, 0.05 to 2 at % of Na as metal element components other than F, S and Se, and the balance composed of Cu and unavoidable impurities. The sputtering target contains Na in at least one form selected from among sodium fluoride, sodium sulfide, and sodium selenide, and has a content of oxygen of from 100 to 1,000 ppm.
Public/Granted literature
- US20140034491A1 SPUTTERING TARGET AND METHOD FOR PRODUCING SAME Public/Granted day:2014-02-06
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