Invention Grant
- Patent Title: Transparent gas barrier film, method for producing transparent gas barrier film, organic EL element, solar battery, and thin film battery
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Application No.: US14364945Application Date: 2012-12-14
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Publication No.: US09660208B2Publication Date: 2017-05-23
- Inventor: Yasumi Yamada
- Applicant: Nitto Denko Corporation
- Applicant Address: JP Ibaraki-shi
- Assignee: NITTO DENKO CORPORATION
- Current Assignee: NITTO DENKO CORPORATION
- Current Assignee Address: JP Ibaraki-shi
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Priority: JP2011-286943 20111227; JP2012-045293 20120301
- International Application: PCT/JP2012/082474 WO 20121214
- International Announcement: WO2013/099654 WO 20130704
- Main IPC: C23C14/54
- IPC: C23C14/54 ; H01L51/50 ; B32B9/00 ; H01L51/44 ; H01L51/52 ; H01L31/048 ; H01M2/02 ; H01L31/049 ; B32B27/06 ; C23C14/32

Abstract:
A transparent gas barrier film that has excellent gas barrier properties and includes a transparent gas barrier layer having a very low internal stress, and a method for producing the same. The transparent gas barrier film according to the present invention includes: a resin substrate; and a transparent gas barrier layer formed over the resin substrate. The transparent gas barrier layer includes at least one kind selected from the group consisting of metals and metalloids. The transparent gas barrier layer includes a plurality of layers each having a density that changes continuously from high density to low density or from low density to high density and then cycles alternatively from low density to high density or high density to low density, respectively, once or two or more times.
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