Invention Grant
- Patent Title: Measurement apparatus, measurement method, and method of manufacturing article
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Application No.: US14477331Application Date: 2014-09-04
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Publication No.: US09664604B2Publication Date: 2017-05-30
- Inventor: Yasushi Iwasaki
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2013-186578 20130909
- Main IPC: G06F19/00
- IPC: G06F19/00 ; G01N3/56 ; G01B9/02 ; G01B7/012 ; G01B7/28 ; G01B11/00

Abstract:
The present invention provides a measurement apparatus which includes a probe having a leading edge portion configured to come into contact with a surface to be measured and a holding portion configured to hold the leading edge portion, and measures a shape of the surface by scanning the probe relative to the surface in a state in which the leading edge portion and the surface are in contact, comprising a processing unit configured to correct measurement data at a measurement point on the surface based on data of a scanning distance of the probe and information about abrasion of the leading edge portion caused by scanning of the probe.
Public/Granted literature
- US20150073740A1 MEASUREMENT APPARATUS, MEASUREMENT METHOD, AND METHOD OF MANUFACTURING ARTICLE Public/Granted day:2015-03-12
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