Invention Grant
- Patent Title: Method and apparatus for treating a workpiece with arrays of nozzles
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Application No.: US14635826Application Date: 2015-03-02
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Publication No.: US09666456B2Publication Date: 2017-05-30
- Inventor: Jimmy D. Collins , David P. DeKraker , Tracy A. Gast , Alan D. Rose
- Applicant: TEL FSI, Inc.
- Applicant Address: US MN Chaska
- Assignee: TEL FSI, INC.
- Current Assignee: TEL FSI, INC.
- Current Assignee Address: US MN Chaska
- Agency: Kagan Binder, PLLC
- Main IPC: H01L21/67
- IPC: H01L21/67
Abstract:
The present invention provides a tool for treating microelectronic workpieces with one or more treatment materials, including liquids, gases, fluidized solids, dispersions, combinations of these, and the like.
Public/Granted literature
- US20150170941A1 METHOD AND APPARATUS FOR TREATING A WORKPIECE WITH ARRAYS OF NOZZLES Public/Granted day:2015-06-18
Information query
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