• Patent Title: Tray for a wafer with tape frame
  • Application No.: US14761837
    Application Date: 2014-02-07
  • Publication No.: US09666468B2
    Publication Date: 2017-05-30
  • Inventor: Masayuki Nishijima
  • Applicant: ACHILLES CORPORATION
  • Applicant Address: JP Tokyo
  • Assignee: ACHILLES CORPORATION
  • Current Assignee: ACHILLES CORPORATION
  • Current Assignee Address: JP Tokyo
  • Agent Manabu Kanesaka
  • Priority: JP2013-023926 20130211
  • International Application: PCT/JP2014/052878 WO 20140207
  • International Announcement: WO2014/123216 WO 20140814
  • Main IPC: H01L21/683
  • IPC: H01L21/683 H01L21/673
Tray for a wafer with tape frame
Abstract:
A tray for storing a wafer with a tape frame in a storage container includes a ring-shaped frame, a dicing tape and a semiconductor wafer. The dicing tape is stuck on the rear surface of the ring-shaped frame, and the semiconductor wafer is supported on the dicing tape. The tray has a substantially circular shape and is positioned on the upper side and the lower side of the wafer with tape frame. The front surface of the tray has a flat portion for mounting the wafer, and at least a portion of the outer peripheral portion of the front surface of the tray includes a convex portion. A projecting portion is formed on the rear surface so that the projection portion is positioned outside the outer periphery of the semiconductor wafer of the wafer with the tape frame when the tray is positioned on the wafer with tape frame.
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