Invention Grant
- Patent Title: High thermal budget magnetic memory
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Application No.: US15071180Application Date: 2016-03-15
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Publication No.: US09666640B2Publication Date: 2017-05-30
- Inventor: Vinayak Bharat Naik , Kangho Lee , Taiebeh Tahmasebi , Chenchen Jacob Wang
- Applicant: GLOBALFOUNDRIES Singapore Pte. Ltd.
- Applicant Address: SG Singapore
- Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Current Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Current Assignee Address: SG Singapore
- Agency: Horizon IP Pte. Ltd.
- Main IPC: H01L27/22
- IPC: H01L27/22 ; H01L43/08 ; H01L43/10 ; H01L43/12 ; H01L43/02 ; G11C11/16 ; H01L29/66

Abstract:
Semiconductor devices and methods for forming a semiconductor device are disclosed. The method includes forming a storage unit of a magnetic memory cell. A bottom electrode and a fixed layer are formed. The fixed layer includes a composite spacer layer disposed on the bottom electrode. The composite spacer layer includes a base layer and an amorphous buffer layer disposed over the base layer. A reference layer is disposed on the composite spacer layer. The amorphous buffer layer serves as a template for the reference layer to have a desired crystalline structure in a desired orientation. At least one tunneling barrier layer is formed over the fixed layer. A storage layer is formed over the tunneling barrier layer and a top electrode is formed over the storage layer.
Public/Granted literature
- US20160276407A1 HIGH THERMAL BUDGET MAGNETIC MEMORY Public/Granted day:2016-09-22
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