Invention Grant
- Patent Title: Memory structure having material layer made from a transition metal on interlayer dielectric
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Application No.: US14977770Application Date: 2015-12-22
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Publication No.: US09666797B1Publication Date: 2017-05-30
- Inventor: Feng-Min Lee , Yu-Yu Lin
- Applicant: MACRONIX INTERNATIONAL CO., LTD.
- Applicant Address: TW Hsinchu
- Assignee: MACRONIX INTERNATIONAL CO., LTD.
- Current Assignee: MACRONIX INTERNATIONAL CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: McClure, Qualey & Rodack, LLP
- Main IPC: H01L45/00
- IPC: H01L45/00

Abstract:
A memory structure and a manufacturing method for the same are disclosed. The memory structure comprises a lower electrode, an upper insulating layer, a material layer, a dielectric film, and an upper electrode. The upper insulating layer is on the lower electrode. The material layer is on the upper insulating layer. The upper insulating layer and the material layer have a common opening to expose a portion of the lower electrode. The dielectric film is on the exposed portion of the lower electrode. The dielectric film and the material layer contain a same first transition metal. The upper electrode is on the dielectric film and fills the common opening.
Public/Granted literature
- US20170179384A1 MEMORY STRUCTURE HAVING MATERIAL LAYER MADE FROM A TRANSITION METAL ON INTERLAYER DIELECTRIC Public/Granted day:2017-06-22
Information query
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