Invention Grant
- Patent Title: System and method for quick-swap of multiple substrates
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Application No.: US13898019Application Date: 2013-05-20
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Publication No.: US09669552B2Publication Date: 2017-06-06
- Inventor: Robert Brent Vopat , Jason M. Schaller , William Weaver
- Applicant: Varian Semiconductor Equipment Associates, Inc.
- Applicant Address: US MA Gloucester
- Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee Address: US MA Gloucester
- Main IPC: H01L21/677
- IPC: H01L21/677 ; B25J15/00 ; H01L21/67 ; B25J11/00

Abstract:
A system and method are disclosed for substrate handling. The system can include a robot adapter configured to connect to a robot, and first and second end effectors connected to the robot adapter. The robot adapter is configured to move the first and second end effectors from a first, retracted, position to a second, extended, position. In the extended position, the first or second end effector is disposed within a top entry load lock for picking or dropping a plurality of substrates therein. The first and second end effectors can be selectively and independently movable. The robot adapter can be rotatable so as to selectively position one of the end effectors over the top entry load lock. Methods for quickly swapping processed and unprocessed substrates in the top entry load lock are also disclosed and claimed.
Public/Granted literature
- US20140341700A1 SYSTEM AND METHOD FOR QUICK-SWAP OF MULTIPLE SUBSTRATES Public/Granted day:2014-11-20
Information query
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