Invention Grant
- Patent Title: Micromechanical sensor unit and method for manufacturing micromechanical sensor units
-
Application No.: US14530437Application Date: 2014-10-31
-
Publication No.: US09670055B2Publication Date: 2017-06-06
- Inventor: Jochen Reinmuth , Julian Gonska
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Norton Rose Fulbright US LLP
- Agent Gerard Messina
- Priority: DE102013222517 20131106
- Main IPC: B81B3/00
- IPC: B81B3/00 ; B81C1/00 ; G01P15/00 ; G01R33/028 ; G01P15/08

Abstract:
A method for manufacturing a micromechanical sensor unit, the micromechanical sensor unit including a substrate and a sealing cap, in the first method step the substrate and the sealing cap being configured and joined in such a way that, as a result of bonding the sealing cap and the substrate, a first cavity, which has a first pressure and in which a first sensor element is situated, and a second cavity, which has a second pressure and in which a second sensor element is situated, are manufactured, in a second method step a sealable channel leading into the first cavity being created, in a third method step the first pressure in the first cavity being established via the sealable channel.
Public/Granted literature
- US20150123217A1 Micromechanical sensor unit and method for manufacturing micromechanical sensor units Public/Granted day:2015-05-07
Information query