Invention Grant
- Patent Title: Flexible electronics for wearable healthcare sensors
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Application No.: US15262912Application Date: 2016-09-12
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Publication No.: US09670061B1Publication Date: 2017-06-06
- Inventor: Huan Hu , Ning Li , Xiao Hu Liu , Katsuyuki Sakuma
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Vazken Alexanian
- Main IPC: H01L21/762
- IPC: H01L21/762 ; B81B3/00 ; B81C1/00

Abstract:
Aspects include a method of manufacturing a flexible electronic structure that includes a metal or doped silicon substrate. Aspects include depositing an insulating layer on a silicon substrate. Aspects also include patterning a metal on a silicon substrate. Aspects also include selectively masking the structure to expose the metal and a portion of the silicon substrate. Aspects also include depositing a conductive layer including a conductive metal on the structure. Aspects also include plating the conductive material on the structure. Aspects also include spalling the structure.
Information query
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