Invention Grant
- Patent Title: Chemical sensor, chemical sensor module, biomolecule detection apparatus, and biomolecule detection method
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Application No.: US14348988Application Date: 2012-10-11
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Publication No.: US09670532B2Publication Date: 2017-06-06
- Inventor: Nobuyuki Matsuzawa , Kensaku Maeda , Yusuke Moriya , Ken Ozawa
- Applicant: Sony Corporation
- Applicant Address: JP Tokyo
- Assignee: SONY CORPORATION
- Current Assignee: SONY CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Dentons US LLP
- Priority: JP2011-231470 20111021
- International Application: PCT/JP2012/006509 WO 20121011
- International Announcement: WO2013/057905 WO 20130425
- Main IPC: C12Q1/68
- IPC: C12Q1/68 ; G01N21/64 ; G01N33/543 ; G01N33/58
Abstract:
A chemical sensor including a substrate, an on-chip lens layer, and a flattening layer. On the substrate, a plurality of photodiodes are formed and arranged in a planar form. The on-chip lens layer collects incident light to the photodiodes and is provided on the substrate. The flattening layer covers and planarizes the on-chip lens to form a probe holding surface for holding a probe material.
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