Invention Grant
- Patent Title: Oxide sintered body, sputtering target, and oxide semiconductor thin film obtained using sputtering target
-
Application No.: US15117531Application Date: 2015-02-12
-
Publication No.: US09670578B2Publication Date: 2017-06-06
- Inventor: Tokuyuki Nakayama , Eiichiro Nishimura , Fumihiko Matsumura , Masashi Iwara
- Applicant: SUMITOMO METAL MINING CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: SUMITOMO METAL MINING CO., LTD.
- Current Assignee: SUMITOMO METAL MINING CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Kratz, Quintos & Hanson, LLP
- Priority: JP2014-037022 20140227; JP2014-163148 20140808; JP2014-263622 20141225
- International Application: PCT/JP2015/053849 WO 20150212
- International Announcement: WO2015/129469 WO 20150903
- Main IPC: C04B35/453
- IPC: C04B35/453 ; H01B1/02 ; C23C14/34 ; H01L21/02 ; C04B35/01 ; C23C14/08 ; C23C14/58

Abstract:
An oxide sintered body which, when made into an oxide semiconductor thin film by sputtering, can achieve low carrier density and high carrier mobility, and a sputtering target using said oxide sintered body are provided. This oxide sintered body contains indium, gallium and zinc as oxides. The gallium content is 0.08 or more and less than 0.20 in terms of Ga/(In+Ga) atomic ratio, and the zinc content is 0.0001 or more and less than 0.08 in terms of Zn/(In+Ga+Zn) atomic ratio. This crystalline oxide semiconductor thin film is formed with the oxide sintered body as a sputtering target, and can achieve a carrier density of 8.0×1017 cm−3 or less and a carrier mobility of 10 cm2/V·s or greater.
Public/Granted literature
Information query
IPC分类: