Invention Grant
- Patent Title: Method for adjusting vapor-phase growth apparatus
-
Application No.: US14779715Application Date: 2014-03-18
-
Publication No.: US09670583B2Publication Date: 2017-06-06
- Inventor: Shuuichi Koseki
- Applicant: TAIYO NIPPON SANSO CORPORATION
- Applicant Address: JP Tokyo
- Assignee: TAIYO NIPPON SANSO CORPORATION
- Current Assignee: TAIYO NIPPON SANSO CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Nixon & Vanderhye P.C.
- Priority: JP2013-070803 20130329
- International Application: PCT/JP2014/057421 WO 20140318
- International Announcement: WO2014/156853 WO 20141002
- Main IPC: C23C16/46
- IPC: C23C16/46 ; C23C16/52 ; C23C14/54

Abstract:
A method of adjusting vapor-phase growth apparatuses in which the individual difference of a heater-set temperature and a surface temperature of substrate-mounted plate among the vapor-phase growth apparatuses is eliminated. The method of adjusting vapor-phase growth apparatuses includes a thermocouple-location-adjusting step, in which the relative location of a thermocouple and a heater is adjusted so that the change amount of the surface temperature of a substrate-mounted plate with respect to the change amount in the heater-set temperature reaches a predetermined value, and a temperature-control-value-correcting step, in which the thermocouple is disposed at the location adjusted in the thermocouple-location-adjusting step, the surface temperature of the substrate-mounted plate is obtained when the substrate-mounted plate is heated by the heater in accordance with a prescribed temperature-set value, and a temperature-control value with respect to a temperature-set value is corrected on the basis of the difference between the temperature-set value at this time and the surface temperature of the substrate-mounted plate.
Public/Granted literature
- US20160083846A1 METHOD FOR ADJUSTING VAPOR-PHASE GROWTH APPARATUS Public/Granted day:2016-03-24
Information query
IPC分类: