Invention Grant
- Patent Title: Method for recharging raw material polycrystalline silicon
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Application No.: US13329368Application Date: 2011-12-19
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Publication No.: US09670593B2Publication Date: 2017-06-06
- Inventor: Hideo Kato , Satoko Yoshimura , Takeshi Ninomiya
- Applicant: Hideo Kato , Satoko Yoshimura , Takeshi Ninomiya
- Applicant Address: DE Munich
- Assignee: SILTRONIC AG
- Current Assignee: SILTRONIC AG
- Current Assignee Address: DE Munich
- Agency: Brooks Kushman P.C.
- Priority: JP2010-294170 20101228
- Main IPC: C30B15/02
- IPC: C30B15/02 ; C30B29/06 ; C30B11/00 ; C30B15/00

Abstract:
A method for recharging raw material polycrystalline silicon which enables large chunks of polycrystalline silicon to be recharged to a CZ ingot growth process while preventing the CZ crucible from being damaged and restricting a decline of the dislocation free rate and the quality of the grown ingot. Polycrystalline silicon chunks are recharged by first forming cushioning layer silicon of smaller chunks. The cushioning layer of polycrystalline silicon chunks are deposited on a surface of the residual silicon melt in a crucible. Subsequently, large-sized polycrystalline silicon chunks are introduced onto the cushioning layer, the cushioning layer cushioning the impact due to dropping of the large-sized polycrystalline silicon chunks.
Public/Granted literature
- US20120160156A1 Method For Recharging Raw Material Polycrystalline Silicon Public/Granted day:2012-06-28
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