Invention Grant
- Patent Title: Methods and systems for optimizing frequency modulation atomic force microscopy
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Application No.: US14384791Application Date: 2013-03-13
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Publication No.: US09671424B2Publication Date: 2017-06-06
- Inventor: Aleksander Labuda , Peter Grutter , Yoichi Miyahara , William Paul , Antoine Roy-Gobeil
- Applicant: The Royal Institution for the Advancement of Learning/McGill University
- Applicant Address: CA Montreal
- Assignee: The Royal Institution of the Advancement of Learning/McGill University
- Current Assignee: The Royal Institution of the Advancement of Learning/McGill University
- Current Assignee Address: CA Montreal
- Agency: Norton Rose Fulbright Canada LLP
- International Application: PCT/CA2013/000216 WO 20130313
- International Announcement: WO2013/134853 WO 20130919
- Main IPC: G01Q60/24
- IPC: G01Q60/24 ; G01Q30/06 ; G01Q60/34

Abstract:
Energy dissipation measurements in Frequency Modulation-Atomic Force Microscopy (FM-AFM) should provide additional information for dynamic force measurements as well as energy dissipation maps for robust material properties imaging as they should not be dependent directly upon the cantilever surface interaction regime. However, unexplained variabilities in experimental data have prevented progress in utilizing such energy dissipation studies. The inventors have demonstrated that the frequency response of the piezoacoustic cantilever excitation system, traditionally assumed flat, can actually lead to surprisingly large apparent damping by the coupling of the frequency shift to the drive-amplitude signal. Accordingly, means for correcting this source of apparent damping are presented allowing dissipation measurements to be reliably obtained and quantitatively compared to theoretical models. The methods are non-destructive and can be both easily and routinely integrated into FM-AFM measurements within vacuum environments where measurements exploiting prior art solutions cannot be performed.
Public/Granted literature
- US20150020245A1 METHODS AND SYSTEMS FOR OPTIMIZING FREQUENCY MODULATION ATOMIC FORCE MICROSCOPY Public/Granted day:2015-01-15
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