Invention Grant
- Patent Title: Multi-layer, multi-material micro-scale and millimeter-scale devices with enhanced electrical and/or mechanical properties
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Application No.: US14017535Application Date: 2013-09-04
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Publication No.: US09671429B2Publication Date: 2017-06-06
- Inventor: Ming Ting Wu , Rulon J. Larsen, III , Young Kim , Kieun Kim , Adam L. Cohen , Ananda H. Kumar , Michael S. Lockard , Dennis R. Smalley
- Applicant: University of Southern California
- Applicant Address: US CA Los Angeles
- Assignee: University of Southern California
- Current Assignee: University of Southern California
- Current Assignee Address: US CA Los Angeles
- Agent Dennis R. Smalley
- Main IPC: B32B15/01
- IPC: B32B15/01 ; G01R1/067

Abstract:
Some embodiments of the invention are directed to electrochemical fabrication methods for forming structures or devices (e.g. microprobes for use in die level testing of semiconductor devices) from a core material and a shell or coating material that (1) partially coats the surface of the structure, (2) completely coats the surface of the structure, and/or (3) completely coats the surface of structural material of each layer from which the structure is formed including interlayer regions. These embodiments incorporate both the core material and the shell material into the structure as each layer is formed along with a sacrificial material that is removed after formation of all layers of the structure. In some embodiments the core material may be a material that would be removed with sacrificial material if it were accessible by an etchant during removal of the sacrificial material.
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