Invention Grant
- Patent Title: In-tool ESD events monitoring method and apparatus
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Application No.: US14140860Application Date: 2013-12-26
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Publication No.: US09671448B2Publication Date: 2017-06-06
- Inventor: Lyle D. Nelsen , Steven B. Heymann , Mark E. Hogsett
- Applicant: Illinois Tool Works Inc.
- Applicant Address: US IL Glenview
- Assignee: Illinois Tool Works Inc.
- Current Assignee: Illinois Tool Works Inc.
- Current Assignee Address: US IL Glenview
- Agency: McAndrews, Held & Malloy, Ltd.
- Main IPC: G01R31/00
- IPC: G01R31/00 ; G01R35/00

Abstract:
In one embodiment of the invention, an apparatus for electrostatic discharges (ESD) events monitoring incorporating a charged device model event simulator (CDMES) unit comprises: at least one antenna positioned in a process area; an ESD detector coupled to said at least one antenna; said ESD detector wirelessly coupled to said CDMES unit; and said ESD detector calibrated for different discharge energies generated by said CDMES unit.
Public/Granted literature
- US20140184253A1 In-tool ESD Events Monitoring Method And Apparatus Public/Granted day:2014-07-03
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