In-tool ESD events monitoring method and apparatus
Abstract:
In one embodiment of the invention, an apparatus for electrostatic discharges (ESD) events monitoring incorporating a charged device model event simulator (CDMES) unit comprises: at least one antenna positioned in a process area; an ESD detector coupled to said at least one antenna; said ESD detector wirelessly coupled to said CDMES unit; and said ESD detector calibrated for different discharge energies generated by said CDMES unit.
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