A wafer inspection apparatus 10 includes a middle plate 22 that mounts a probe card 18 in which multiple contact probes 20 are provided; a drawer type table 21 in which the middle plate 22 is provided; a tester 15 to which the probe card 18 is mounted; and a transfer robot 17 that transfers the middle plate 22. The middle plate 22 includes a base 23 and multiple supports 24 protruding toward the probe card 18 to be mounted. A protruding height of each support 24 is equal to or higher than a protruding length of the contact probe 20 from the probe card 18. The probe card 18 is fastened to a probe card cover 29 when the probe card 18 is mounted on the middle plate 22, and the transfer robot 17 transfers the middle plate 22 from the table 21 to the tester 15.