Invention Grant
- Patent Title: Magnetic sensor test apparatus and method of testing a magnetic sensor
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Application No.: US14287878Application Date: 2014-05-27
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Publication No.: US09671484B2Publication Date: 2017-06-06
- Inventor: Ki-bog Youm , Young-bae Choi , Young-sug Seong , Kyung-seok Jin
- Applicant: HAECHITECH CORPORATION
- Applicant Address: KR Cheongju-si
- Assignee: HAECHITECH CORPORATION
- Current Assignee: HAECHITECH CORPORATION
- Current Assignee Address: KR Cheongju-si
- Agency: NSIP Law
- Priority: KR10-2013-0094134 20130808
- Main IPC: G01R35/00
- IPC: G01R35/00
Abstract:
Provided are a magnetic sensor test apparatus and a magnetic sensor test method. The magnetic sensor test apparatus includes a vertical coil and at least one periphery coil disposed peripherally about the vertical coil. Both the vertical coil and the periphery coil may be configured to generate a horizontal and/or a vertical magnetic field in a semiconductor wafer.
Public/Granted literature
- US20150042318A1 MAGNETIC SENSOR TEST APPARATUS AND METHOD Public/Granted day:2015-02-12
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