Invention Grant
- Patent Title: Optical waveguide for guiding illumination light
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Application No.: US14833954Application Date: 2015-08-24
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Publication No.: US09671548B2Publication Date: 2017-06-06
- Inventor: Christian Wald , Stefan Schaff , Markus Deguenther , Daniel Runde
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102013204442 20130314
- Main IPC: G02B6/26
- IPC: G02B6/26 ; G02B6/42 ; F21V8/00 ; G02B27/09 ; G03F7/20

Abstract:
An optical waveguide serves for guiding illumination light. The waveguide has a waveguide main body for guiding the illumination light between a main body entrance region and a main body exit region. At least one coupling-out device is provided in the main body exit region. Via the coupling-out device, at least one coupling-out illumination light partial beam is coupled out from the illumination light emerging from the waveguide main body. This is done such that the coupling-out illumination light partial beam can be separated from the rest of the illumination light beam emerging from the waveguide main body. This results in a waveguide having improved possibilities for use when guiding illumination light.
Public/Granted literature
- US20150362660A1 Optical Waveguide for Guiding Illumination Light Public/Granted day:2015-12-17
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