Microscope having an autofocusing device and autofocusing method for microscopes
Abstract:
A method for autofocusing in microscopic examination of a specimen located at the focus of a microscope objective uses an autofocus beam path, the autofocus beam path being directed, via a deflection device arranged on the side of the microscope objective facing away from the specimen, toward the microscope objective, and from there onto a reflective autofocus interface in the specimen region. The autofocus beam path is reflected at the autofocus interface and directed via the microscope objective and the deflection device toward an autofocus detector. The deflection device comprises two regions spaced apart from one another in a propagation direction of the autofocus beam path. Each region reflects the autofocus beam path. The autofocus detector is arranged in a plane conjugated with the microscope objective pupil to acquire an interference pattern. The focus of the microscope is adjusted as a function of the acquired interference pattern.
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