A method for optically measuring height profiles of surfaces, in which an image of the height profile is recorded using an optical recording system, is characterized in that the image is a differential interference contrast image and height gradients within the height profile are represented by intensity gradients, which are quantitatively or qualitatively evaluatable. The surfaces can have structures having a defined profile, in which intensity gradients in the differential interference contrast image, which assume, within a specified tolerance and within a specified range, a value which deviates from a predetermined value or assume a selected value from within a specified tolerance and within a specified range, indicate a defect.