Invention Grant
- Patent Title: Cholate photoacid generators and photoresists comprising same
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Application No.: US12965339Application Date: 2010-12-10
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Publication No.: US09671689B2Publication Date: 2017-06-06
- Inventor: Emad Aqad , Mingqi Li , Joseph Mattia , Cheng-Bai Xu
- Applicant: Emad Aqad , Mingqi Li , Joseph Mattia , Cheng-Bai Xu
- Applicant Address: US MA Marlborough
- Assignee: Rohm and Haas Electronic Materials LLC
- Current Assignee: Rohm and Haas Electronic Materials LLC
- Current Assignee Address: US MA Marlborough
- Agency: Mintz Levin Cohn Ferris Glovsky and Popeo, P.C.
- Agent Peter F. Corless
- Main IPC: C07J31/00
- IPC: C07J31/00 ; G03F7/004 ; C07C381/12 ; G03F7/038
Abstract:
New photoacid generator compounds (“PAGs”) are provided that comprise a cholate moiety and photoresist compositions that comprise such PAG compounds.
Public/Granted literature
- US20110250537A1 CHOLATE PHOTOACID GENERATORS AND PHOTORESISTS COMPRISING SAME Public/Granted day:2011-10-13
Information query
