Invention Grant
- Patent Title: Resist composition and method for producing resist pattern
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Application No.: US13325910Application Date: 2011-12-14
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Publication No.: US09671693B2Publication Date: 2017-06-06
- Inventor: Koji Ichikawa , Takashi Hiraoka , Shingo Fujita
- Applicant: Koji Ichikawa , Takashi Hiraoka , Shingo Fujita
- Applicant Address: JP Tokyo
- Assignee: SUMITOMO CHEMICAL COMPANY, LIMITED
- Current Assignee: SUMITOMO CHEMICAL COMPANY, LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: JP2010-279094 20101215; JP2011-157529 20110719
- Main IPC: G03F7/039
- IPC: G03F7/039 ; G03F7/004 ; G03F7/20

Abstract:
A resist composition contains; (A1) a resin having a structural unit represented by the formula (aa) and at least one structural unit selected from the group consisting of a structural unit represented by the formula (a1-1) and a structural unit represented by the formula (a1-2); (A2) a resin which does not have the structural unit represented by the formula (aa) and which is insoluble or poorly soluble in aqueous alkali solution, but becomes soluble in aqueous alkali solution by the action of acid; and (B) an acid generator, wherein Raa1, Aaa1, Raa2, La1, La2, Ra4, Ra5, Ra6, Ra7, m1, n1 and n1′ are defined in the specification.
Public/Granted literature
- US20120156620A1 RESIST COMPOSITION AND METHOD FOR PRODUCING RESIST PATTERN Public/Granted day:2012-06-21
Information query
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