Apparatus and methods for temperature compensation of variable capacitors are provided herein. In certain configurations, an integrated circuit (IC) includes a variable capacitor array, an array biasing circuit that biases cells of the variable capacitor array to control the array's capacitance, and a bias voltage level control circuit that generates one or more temperature dependent bias voltages used by the array biasing circuit to bias the variable capacitor array's cells. The bias voltage level control circuit controls the one or more temperature dependent bias voltages to change with temperature so as to compensate the variable capacitor array for changes to capacitance arising from temperature variation.