Invention Grant
- Patent Title: Edge ramping
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Application No.: US15204702Application Date: 2016-07-07
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Publication No.: US09673026B2Publication Date: 2017-06-06
- Inventor: John C. Valcore, Jr. , Bradford J. Lyndaker , Andrew S. Fong
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Martine Penilla Group, LLP
- Main IPC: H05B31/26
- IPC: H05B31/26 ; H01J37/32 ; H05H1/46

Abstract:
Systems and methods for performing edge ramping are described. A system includes a base RF generator for generating a first RF signal. The first RF signal transitions from one state to another. The transition from one state to another of the first RF signal results in a change in plasma impedance. The system further includes a secondary RF generator for generating a second RF signal. The second RF signal transitions from one state to another to stabilize the change in the plasma impedance. The system includes a controller coupled to the secondary RF generator. The controller is used for providing parameter values to the secondary RF generator to perform edge ramping of the second RF signal when the second RF signal transitions from one state to another.
Public/Granted literature
- US20160322202A1 EDGE RAMPING Public/Granted day:2016-11-03
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