Invention Grant
- Patent Title: Substrate freeze dry apparatus and method
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Application No.: US13273090Application Date: 2011-10-13
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Publication No.: US09673037B2Publication Date: 2017-06-06
- Inventor: Stephen M. Sirard , Diane Hymes , Alan M. Schoepp
- Applicant: Stephen M. Sirard , Diane Hymes , Alan M. Schoepp
- Applicant Address: US CA Fremont
- Assignee: Law Research Corporation
- Current Assignee: Law Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Beyer Law Group LLP
- Main IPC: F26B5/06
- IPC: F26B5/06 ; H01L21/02 ; H01L21/67 ; H01L21/683
Abstract:
An apparatus for freeze drying a substrate is provided. A chamber for receiving a substrate is provided. An electrostatic chuck (ESC) for supporting and electrostatically clamping the substrate is within the chamber. A temperature controller controls the temperature of the electrostatic chuck. A condenser is connected to the chamber. A vacuum pump is in fluid connection with the chamber.
Public/Granted literature
- US20120304483A1 SUBSTRATE FREEZE DRY APPARATUS AND METHOD Public/Granted day:2012-12-06
Information query
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