Invention Grant
- Patent Title: Gallium nitride substrate and manufacturing method of nitride semiconductor crystal
-
Application No.: US14740725Application Date: 2015-06-16
-
Publication No.: US09673046B2Publication Date: 2017-06-06
- Inventor: Yusuke Tsukada , Shuichi Kubo , Kazunori Kamada , Hideo Fujisawa , Tatsuhiro Ohata , Hirotaka Ikeda , Hajime Matsumoto , Yutaka Mikawa
- Applicant: MITSUBISHI CHEMICAL CORPORATION
- Applicant Address: JP Tokyo
- Assignee: MITSUBISHI CHEMICAL CORPORATION
- Current Assignee: MITSUBISHI CHEMICAL CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2012-275035 20121217; JP2013-072629 20130329; JP2013-114619 20130530
- Main IPC: H01L21/02
- IPC: H01L21/02 ; C30B25/00 ; C30B25/02 ; C30B29/40 ; H01L29/32 ; H01L33/00 ; H01L33/12

Abstract:
The invention provides a nonpolar or semipolar GaN substrate, in which a nitride semiconductor crystal having a low stacking fault density can be epitaxially grown on the main surface of the substrate, and a method for manufacturing an M-plane GaN substrate by forming a mask pattern having a line-shaped opening parallel to an a-axis of a C-plane GaN substrate on an N-polar plane of the C-plane GaN substrate, growing a plane-shape GaN crystal of which thickness direction is an m-axis direction from the opening of the mask pattern by an ammonothermal method, and cutting out the M-plane GaN substrate from the plane-shape GaN crystal.
Public/Granted literature
- US20150311068A1 GALLIUM NITRIDE SUBSTRATE AND MANUFACTURING METHOD OF NITRIDE SEMICONDUCTOR CRYSTAL Public/Granted day:2015-10-29
Information query
IPC分类: