Invention Grant
- Patent Title: Wafer container with door guide and seal
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Application No.: US13880948Application Date: 2011-10-19
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Publication No.: US09673075B2Publication Date: 2017-06-06
- Inventor: Barry Gregerson , Matthew A. Fuller , Michael S. Adams
- Applicant: Barry Gregerson , Matthew A. Fuller , Michael S. Adams
- Applicant Address: US MA Billerica
- Assignee: ENTEGRIS, INC.
- Current Assignee: ENTEGRIS, INC.
- Current Assignee Address: US MA Billerica
- International Application: PCT/US2011/056944 WO 20111019
- International Announcement: WO2012/054644 WO 20120426
- Main IPC: B65D85/00
- IPC: B65D85/00 ; H01L21/673

Abstract:
A wafer container that reduces or alleviates one or more of the problems associated with excessive container wall deflection due to loading and excessive particulate generation, particularly as those problems are experienced with containers for 450 mm diameter and larger wafers. The container has an enclosure and door with interlocking features to enable transfer of tension load to the door to minimize deflection of container surfaces. The container may include a gasketing arrangement compatible with the interlock feature. The container may include a removable door guide that improves centering of the door during door installation, and that is made of low particle generating material to reduce particulates.
Public/Granted literature
- US20130319907A1 WAFER CONTAINER WITH DOOR GUIDE AND SEAL Public/Granted day:2013-12-05
Information query
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