Invention Grant
- Patent Title: System and method for rotational transfer of articles between vacuum and non-vacuum environments
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Application No.: US14072419Application Date: 2013-11-05
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Publication No.: US09673076B2Publication Date: 2017-06-06
- Inventor: Sheri A. Roub , Stacia L. Theriault , Fletcher I. Potter , Daniel L. Goodwin , Omar S. Kiyani , Scott C. Holden
- Applicant: Varian Semiconductor Equipment Associates, Inc.
- Applicant Address: US MA Gloucester
- Assignee: VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
- Current Assignee: VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
- Current Assignee Address: US MA Gloucester
- Main IPC: H01L21/677
- IPC: H01L21/677 ; H01L21/67

Abstract:
A device for transferring articles between an atmospheric pressure environment and a vacuum environment includes a transfer housing having an atmospheric transfer port, a pumping port, a vacuum transfer port, and a venting port disposed in a circumferentially-spaced relationship. The vacuum transfer port is in communication with the vacuum environment and the atmospheric transfer port is in communication with the atmospheric pressure environment. The device can include a carrier disc rotatably disposed within the transfer housing, the carrier disc having a pocket formed in a sidewall thereof for holding an article. The device may further include an air bearing associated with the transfer housing and configured to expel gas to maintain a gap between the transfer housing and the carrier disc.
Public/Granted literature
- US20150125239A1 SYSTEM AND METHOD FOR ROTATIONAL TRANSFER OF ARTICLES BETWEEN VACUUM AND NON-VACUUM ENVIRONMENTS Public/Granted day:2015-05-07
Information query
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