Invention Grant
- Patent Title: Method for bonding substrates
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Application No.: US14416297Application Date: 2012-07-26
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Publication No.: US09673167B2Publication Date: 2017-06-06
- Inventor: Markus Wimplinger
- Applicant: Markus Wimplinger
- Applicant Address: AT St. Florian am Inn
- Assignee: EV GROUP E. THALLNER GMBH
- Current Assignee: EV GROUP E. THALLNER GMBH
- Current Assignee Address: AT St. Florian am Inn
- Agency: Kusner & Jaffe
- International Application: PCT/EP2012/064736 WO 20120726
- International Announcement: WO2014/015912 WO 20140130
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L31/18 ; B32B37/24 ; B32B38/00 ; C23C14/08 ; C23C16/40

Abstract:
This invention relates to a method for bonding of a first contact area of a first at least largely transparent substrate to a second contact area of a second at least largely transparent substrate, on at least one of the contact areas an oxide being used for bonding, from which an at least largely transparent interconnection layer is formed with an electrical conductivity of at least 10e1 S/cm2 (measurement: four point method, relative to temperature of 300K) and an optical transmittance greater than 0.8 (for a wavelength range from 400 nm to 1500 nm) on the first and second contact area.
Public/Granted literature
- US20150179604A1 METHOD FOR BONDING SUBSTRATES Public/Granted day:2015-06-25
Information query
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