Invention Grant
- Patent Title: Efficient fabrication of BiCMOS devices
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Application No.: US14659929Application Date: 2015-03-17
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Publication No.: US09673191B2Publication Date: 2017-06-06
- Inventor: Edward Preisler , Todd Thibeault
- Applicant: Newport Fab, LLC
- Applicant Address: US CA Newport Beach
- Assignee: Newport Fab, LLC
- Current Assignee: Newport Fab, LLC
- Current Assignee Address: US CA Newport Beach
- Agency: Farjami & Farjami LLP
- Main IPC: H01L27/06
- IPC: H01L27/06 ; H01L21/8249 ; H01L29/161 ; H01L29/417 ; H01L27/102 ; H01L29/165

Abstract:
A bipolar complementary-metal-oxide-semiconductor (BiCMOS) device is disclosed. The BiCMOS device includes a CMOS device in a CMOS region, a PNP bipolar device in a bipolar region, and a spacer clear region defined by an opening in a common spacer layer over the CMOS region and the bipolar region, wherein a sub-collector, a selectively implanted collector, and a base of the PNP bipolar device are formed in the spacer clear region. The PNP bipolar device further includes a collector sinker adjacent to the spacer clear region and electrically connected to the sub-collector of the PNP bipolar device. The BiCMOS device can further include an NPN bipolar device having a sub-collector, a selectively implanted collector and a base in another spacer clear region.
Public/Granted literature
- US20150303186A1 Efficient Fabrication of BiCMOS Devices Public/Granted day:2015-10-22
Information query
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