Invention Grant
- Patent Title: Manufacturing method for reverse conducting insulated gate bipolar transistor
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Application No.: US14902519Application Date: 2014-08-19
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Publication No.: US09673193B2Publication Date: 2017-06-06
- Inventor: Shuo Zhang , Qiang Rui , Genyi Wang , Xiaoshe Deng
- Applicant: CSMC TECHNOLOGIES FAB1 CO., LTD.
- Applicant Address: CN Wuxi New District
- Assignee: CSMC TECHNOLOGIES FAB1 CO., LTD.
- Current Assignee: CSMC TECHNOLOGIES FAB1 CO., LTD.
- Current Assignee Address: CN Wuxi New District
- Agency: Kagan Binder, PLLC
- Priority: CN201310374240 20130823
- International Application: PCT/CN2014/084720 WO 20140819
- International Announcement: WO2015/024502 WO 20150226
- Main IPC: H01L27/06
- IPC: H01L27/06 ; H01L29/66 ; H01L29/739 ; H01L21/3065 ; H01L21/265 ; H01L21/304 ; H01L29/10 ; H01L29/06

Abstract:
A manufacturing method for reverse conducting insulated gate bipolar transistor, the manufacturing method is characterized by the use of polysilicon for filling in grooves on the back of a reverse conducting insulated gate bipolar transistor. The parameters of reverse conducting diodes on the back of the reverse conducting insulated gate bipolar transistor can be controlled simply by controlling the doping concentration of the polysilicon accurately, indicating relatively low requirements for process control. The reverse conducting insulated gate bipolar transistor manufacturing method is relatively low in requirements for process control and relatively small in manufacturing difficulty.
Public/Granted literature
- US20160379974A1 MANUFACTURING METHOD FOR REVERSE CONDUCTING INSULATED GATE BIPOLAR TRANSISTOR Public/Granted day:2016-12-29
Information query
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